High-Aspect-Ratio Nanoscale Patterning in a Negative Tone Photoresist
نویسندگان
چکیده
منابع مشابه
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ژورنال
عنوان ژورنال: Journal of information and communication convergence engineering
سال: 2015
ISSN: 2234-8255
DOI: 10.6109/jicce.2015.13.1.056